Spin current magnetization rotational element, magnetoresistance effect element, and magnetic memory

ABSTRACT

Provided is a spin current magnetization rotational element including: a first ferromagnetic metal layer for a magnetization direction to be changed; and a spin-orbit torque wiring. The spin-orbit torque wiring has a structure in which a spin conduction layer and an interfacial spin generation layer are alternately laminated in the first direction, the number of a plurality of the interfacial spin generation layers is two or greater, and in the spin-orbit torque wiring, one of the plurality of interfacial spin generation layers is closest to the first ferromagnetic metal layer.

CROSS REFERENCE TO RELATED APPLICATION

This application is a divisional application of U.S. application Ser.No. 16/080,848, filed Aug. 29, 2018, the contents of which areincorporated herein by reference.

TECHNICAL FIELD

The present invention relates to a spin current magnetization rotationalelement, and more particularly, to a spin current magnetization reversalelement. In addition, the invention also relates to a magneto resistanceeffect element and a magnetic memory.

Priority is claimed on Japanese Patent Application No. 2017-034758,filed Feb. 27, 2017, the content of which is incorporated herein byreference.

BACKGROUND ART

A giant magnetoresistive (GMR) element that is constituted by amulti-layer film of a ferromagnetic layer and a nonmagnetic layer, and atunnel magnetoresistive (TMR) element using an insulating layer (atunnel barrier layer, a barrier layer) as a nonmagnetic layer are known.Typically, the TMR element has higher element resistance in comparisonto the GMR element, but a magneto resistance (MR) ratio of the TMRelement is greater than an MR ratio of the GMR element. According tothis, the TMR element has attracted attention as an element for amagnetic sensor, a high-frequency component, a magnetic head, and anonvolatile magnetoresistive random access memory (MRAM).

In the MRAM, data is read and written by using characteristics in whichwhen magnetization directions of two ferromagnetic layers with aninsulating layer interposed therebetween vary, element resistance of theTMR element varies. As a writing type of the MRAM, a type in whichwriting (magnetization reversal) is performed by using a magnetic fieldformed by a current, and a type in which writing (magnetizationreversal) is performed by using spin transfer torque (STT) that occurswhen a current is allowed to flow in a lamination direction of a magnetoresistance effect element are known. The magnetization reversal of theTMR element which uses STT is efficient from the viewpoint of energyefficiency, but a reversal current density for magnetization reversal ishigh. It is preferable that the reversal current density is low from theviewpoint of a long operational lifespan of the TMR element. Thispreference is also true of the GMR element.

Accordingly, in recent years, as means for reducing a reversal currentwith a mechanism different from the STT, a magnetization reversal typeusing a pure spin current generated by a spin Hall effect has attractedattention (for example, Non Patent Literature 1). The pure spin current,which is generated by the spin Hall effect, causes spin-orbit torque(SOT), and causes magnetization reversal by the SOT. The pure spincurrent is generated when the same numbers of upward spin electrons andthe same number of downward spin electrons flow in directions oppositeto each other, and flows of charges are canceled. According to this, acurrent that flows to a magneto resistance effect element is zero, andthus realization of a magneto resistance effect element having a smallreversal current density is expected.

According to Non Patent Literature 2, it is reported that a reversalcurrent density by the SOT type is approximately the same as a reversalcurrent density by the STT type. However, the reversal current densitythat is reported in the current SOT type is not sufficient to realizehigh integration and low energy consumption, and thus there is room forimprovement.

In addition, examples of a material that is used in the spin-orbittorque wiring (wiring that causes SOT and generates a pure spin current)of the magneto resistance effect element of the SOT type include a heavymetal material including Ta that is used in Non Patent Literature 2. Theheavy metal material has high electric resistivity. Therefore, when theheavy metal material is used as a thin film or a thin wire, there is aproblem that power consumption is high.

CITATION LIST Patent Literature Non Patent Literature 1

I. M. Miron, K. Garello, G Gaudin, P.-J. Zermatten, M. V Costache, S.Auffret, S. Bandiera, B. Rodmacq, A. Schuhl, and P. Gambardella, Nature,476, 189 (2011)

Non Patent Literature 2

S. Fukami, T. Anekawa, C. Zhang, and H. Ohno, Nature Nanotechnology,DOI:10.1038/NNANO. 2016. 29.

Non Patent Literature 3

J. Sinova, S. O. Valenzuela, J. Wunderlich, C. H. Back, T. Jungwirth,Reviews of Modern Physic, 87, 1213 (2015)

SUMMARY OF INVENTION Technical Problem

The invention has been made in consideration of the above-describedproblem, and an object thereof is to further reduce a current density ofmagnetization rotation or magnetization reversal by an SOT type, and tofurther reduce power consumption in comparison to the related art.

Solution to Problem

The present inventors paid particular attention to an interface Rashbaeffect that occurs in an interface between different kinds of materials,and a spin Hall effect in a heavy metal material among variousprincipals which are considered as a cause for exhibiting SOT, and theyconceived a configuration in which the both effects are effectivelycombined and a low-resistance material is used.

Accordingly, the invention provides the following means to achieve theaforementioned object.

(1) According to an aspect of the invention, there is provided a spincurrent magnetization rotational element including: a firstferromagnetic metal layer for a magnetization direction to be changed;and a spin-orbit torque wiring which extends in a second directionintersecting a first direction that is a plane-orthogonal direction ofthe first ferromagnetic metal layer, the first ferromagnetic metal layerbeing located on one surface of the spin-orbit torque wiring. Thespin-orbit torque wiring has a structure in which a spin conductionlayer and an interfacial spin generation layer are alternately laminatedin the first direction, the number of a plurality of the interfacialspin generation layers is two or greater, and in the spin-orbit torquewiring, one of the plurality of interfacial spin generation layers isclosest to the first ferromagnetic metal layer. In addition, the spincurrent magnetization rotation element according to the aspect of theinvention may include: a first ferromagnetic metal layer for amagnetization direction to be changed; and a spin-orbit torque wiringwhich extends in a second direction intersecting a first direction thatis a plane-orthogonal direction of the first ferromagnetic metal layer,and which is joined to the first ferromagnetic metal layer. Thespin-orbit torque wiring may have a structure in which a spin conductionlayer and an interfacial spin generation layer are alternately laminatedin the first direction, the number of the plurality of interfacial spingeneration layers may be two or greater, and in the spin-orbit torquewiring, one of the plurality of interfacial spin generation layers maybe joined to the first ferromagnetic metal layer.

(2) In the spin current magnetization rotational element according to(1), the thickness of each of the plurality of interfacial spingeneration layers may be two or less times an atomic radius of an atomthat constitutes the interfacial spin generation layer.

(3) In the spin current magnetization rotational element according to(1) or (2), the spin conduction layer may be constituted by a materialthat includes at least any one kind of element among Al, Si, Cu, Ag,GaAs, and Ge.

(4) In the spin current magnetization rotational element according toany one of (1) to (3), the plurality of interfacial spin generationlayers may be constituted by a material that includes any element amongMo, Ru, Rh, Pd, Ta, W, Ir, Pt, Au, or Bi.

(5) In the spin current magnetization rotational element according toany one of (1) to (4), the thickness of the spin conduction layer may beequal to or less than a spin diffusion length of the spin conductionlayer.

(6) In the spin current magnetization rotational element according toany one of (1) to (5), among the plurality of interfacial spingeneration layers, the thickness of the interfacial spin generationlayer closest to the first ferromagnetic metal layer may be smaller thanthe thickness of the other interfacial spin generation layers.

(7) In the spin current magnetization rotational element according toany one of (1 ) to (6), a plurality of the spin conduction layers may beconstituted by materials different from each other in a state in whicheach of the interfacial spin generation layers is interposed between theplurality of spin conduction layers, and among the plurality of spinconduction layers, a spin resistivity of a spin conduction layer closeto the first ferromagnetic metal layer may be smaller than a spinresistivity of a spin conduction layer distant from the firstferromagnetic metal layer.

(8) In the spin current magnetization rotational element according toany one of (1) to (7), when viewed from the first direction, across-sectional area of the interfacial spin generation layer closest tothe first ferromagnetic metal layer may be smaller than across-sectional area of the other interfacial spin generation layerswhich are not closest to the first ferromagnetic metal layer. Inaddition, in the spin current magnetization rotational element accordingto any one of (1) to (7), when viewed from the first direction, across-sectional area of the interfacial spin generation layer that is incontact with the first ferromagnetic metal layer may be smaller than across-sectional area of the other interfacial spin generation layerswhich are not in contact with the first ferromagnetic metal layer.

(9) In the spin current magnetization rotational element according toany one of (1) to (8), the thickness of the spin-orbit torque wiring maybe 20 nm or less.

(10) According to another aspect of the invention, there is provided amagneto resistance effect element including: the spin currentmagnetization rotational element according to any one of (1) to (9); asecond ferromagnetic metal layer in which a magnetization direction isfixed; and a nonmagnetic layer that is interposed between the firstferromagnetic metal layer and the second ferromagnetic metal layer.

(11) According to still another aspect of the invention, there isprovided a magnetic memory including a plurality of magneto resistanceeffect elements according to (10).

Advantageous Effects of Invention

According to the spin current magnetization rotational element of theinvention, it is possible to provide a spin current magnetizationrotational element that causes magnetization rotation due to a pure spincurrent to occur in an effective combination of an interface Rashbaeffect and a spin Hall effect.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1A is a schematic view illustrating a spin current magnetizationrotational element according to an embodiment of the invention, and is aplan view of the spin current magnetization rotational element.

FIG. 1B is a schematic view illustrating the spin current magnetizationrotational element according to the embodiment of the invention, and isa cross-sectional view of the spin current magnetization rotationalelement in FIG. 1A.

FIG. 2 is a schematic view illustrating a spin Hall effect.

FIG. 3A is a schematic view illustrating a spin current magnetizationrotational element according to another embodiment of the invention, andis a plan view of the spin current magnetization rotational element.

FIG. 3B is a schematic view illustrating a spin current magnetizationrotational element according to the embodiment of the invention, and isa cross-sectional view of the spin current magnetization rotationalelement in FIG. 3A.

FIG. 4A is a schematic view illustrating a spin current magnetizationrotational element according to still another embodiment of theinvention, and is a plan view of the spin current magnetizationrotational element.

FIG. 4B is a schematic view illustrating the spin current magnetizationrotation element according to the embodiment of the invention, and is across-sectional view of the spin current magnetization rotationalelement in FIG. 4A.

FIG. 5 is a perspective view schematically illustrating a magnetoresistance effect element according to an embodiment of the invention.

DESCRIPTION OF EMBODIMENTS

Hereinafter, the invention will be described in detail with reference tothe accompanying drawings. Drawings used in the following descriptionmay illustrate a characteristic portion in an enlarged manner for easyunderstanding of characteristics of the invention for convenience, anddimensional ratios and the like of respective constituent elements maybe different from actual dimensional ratios and the like. Materials,dimensions, and the like which are exemplified in the followingdescription are illustrative only, and the invention is not limitedthereto. The invention can be carried out by appropriately makingmodifications in a range that exhibits an effect of the invention. Inelements of the invention, another layer may be provided in a range thatexhibits the effect of the invention.

Spin Current Magnetization Rotational Element

FIGS. 1A and 1B are schematic views illustrating an example of a spincurrent magnetization rotational element according to an embodiment ofthe invention. FIG. 1A is a plan view, and FIG. 1B is a cross-sectionalview taken along line X-X that is a central line of a spin-orbit torquewiring 2 in FIG. 1A in a width direction.

A spin current magnetization rotational element 10 illustrated in FIGS.1A and 1B includes a first ferromagnetic metal layer 1 for amagnetization direction to be changed, and the spin-orbit torque wiring2 that extends in a second direction intersecting a first direction thatis a plane-orthogonal direction of the first ferromagnetic metal layer,and is joined to the first ferromagnetic metal layer 1. The spin-orbittorque wiring 2 has a structure in which a spin conduction layer 3 andan interfacial spin generation layer 4 are alternately laminated in thefirst direction. The number of a plurality of the interfacial spingeneration layers 4 is two or greater. One of the plurality ofinterfacial spin generation layers 4 is joined to the firstferromagnetic metal layer.

A plane-orthogonal direction of the first ferromagnetic metal layer 1,or a direction (first direction) in which the first ferromagnetic metallayer 1 and the spin-orbit torque wiring 2 are laminated is set as a zdirection, and a direction (second direction) that is orthogonal to thez direction and is parallel to the spin-orbit torque wiring 2 is set asan x direction, and a direction (third direction) that is orthogonal tothe x direction and the z direction is set as a y direction. Inaddition, a direction, which is orthogonal to a surface that is joinedto the spin-orbit torque wiring 2 in the first ferromagnetic metal layer1 or a surface that faces the spin-orbit torque wiring 2, is set as aplane-orthogonal direction of the first ferromagnetic metal layer 1. Inaddition, in the z direction (first direction), a direction from thespin-orbit torque wiring 2 to the first ferromagnetic metal layer 1 isset as an upward direction of the z direction, and a direction from thefirst ferromagnetic metal layer 1 to the spin-orbit torque wiring 2 isset as a downward direction of the z direction.

In the following description including FIGS. 1A and 1B, as an example ofa configuration in which the spin-orbit torque wiring 2 extends in adirection intersecting the first direction that is the plane-orthogonaldirection of the first ferromagnetic metal layer 1, description will begiven of a case of a configuration extending in a direction that isorthogonal to the first direction.

The spin current magnetization rotational element 10 of this embodiment,that is, an element that performs magnetization rotation of aferromagnetic metal layer by an SOT effect by a pure spin current can beused in a magneto resistance effect element that performs magnetizationreversal of the ferromagnetic metal layer by only SOT due to the purespin current, and in this case, the spin current magnetizationrotational element can be particularly referred to as “spin currentmagnetization reversal element”. In addition, the spin currentmagnetization rotational element of this embodiment can be used in amagneto resistance effect element that uses STT in the related art asassist means or main means of magnetization reversal of theferromagnetic metal layer.

<First Ferromagnetic Metal Layer>

The first ferromagnetic metal layer 1 includes a known ferromagneticmaterial so that a magnetization direction varies. With regard to moredetails of the first ferromagnetic metal layer 1, description will begiven in association with a first ferromagnetic metal layer 101 in anapplication of the following magneto resistance effect element.

<Spin-Orbit Torque Wiring>

The spin-orbit torque wiring 2 has a configuration in which when acurrent flows, a pure spin current is generated to cause the spin-orbittorque. The spin-orbit torque wiring 2 of this embodiment has astructure in which a spin conduction layer 3 and an interfacial spingeneration layer 4 are alternately laminated in the first direction.

At an interface between the spin conduction layer 3 and the interfacialspin generation layer 4, spin accumulation (a state in which either anupward spin or a downward spin is rich) occurs due to an interfaceRashba effect. The spin accumulation causes the pure spin current tooccur.

Although a detailed mechanism of the interface Rashba effect is notclear, the mechanism is considered as follows. At an interface betweendifferent kinds of materials, it is considered that space reversalsymmetry collapses and thus a potential gradient exists in aplane-orthogonal direction (direction orthogonal to the interface). In acase where a current flows along an interface in which the potentialgradient exists in the plane-orthogonal direction, that is, in a casewhere electrons move in a two-dimensional plane, an effective magneticfield acts on spins in an in-plane direction orthogonal to a movementdirection of electrons, and thus a direction of the spin is arranged inthe effective magnetic field. According to this, spin accumulationoccurs in the interface. In addition, the spin accumulation causes apure spin current, which is diffused to the outside of a plane, tooccur.

In this embodiment, in addition to the interface Rashba effect, a spinHall effect, which occurs in the interfacial spin generation layer 4,particularly, at the inside of the interfacial spin generation layer 4that is joined to the first ferromagnetic metal layer 1, is also used togenerate the pure spin current.

The spin Hall effect is a phenomenon in which when a current flows to amaterial, a pure spin current is caused in a direction orthogonal to adirection of the current on the basis of spin orbit interaction.

FIG. 2 is a schematic view illustrating the spin Hall effect. FIG. 2 isa cross-sectional view obtained by cutting the interfacial spingeneration layer 4 illustrated in FIGS. 1A and 1B, for example, theinterfacial spin generation layer 4 that is joined to the firstferromagnetic metal layer 1 in the x-direction (that is, in an xzplane). Description will be given of a mechanism in which the pure spincurrent is generated due to the spin Hall effect with reference to FIG.2.

As illustrated in FIG. 2, when a current I is allowed to flow in anextension direction of the interfacial spin generation layer 4, a firstspin S1 that is oriented to a front side on a paper surface and a secondspin S2 that is oriented to a back side on the paper surface are curvedin a direction orthogonal to the current. A typical Hall effect and thespin Hall effect are common in that a movement (migration) direction ofmoving (migrating) charges (electrons) can be curved. However, in thetypical Hall effect, when receiving a Lorentz force, the movementdirection of charged particles, which move in a magnetic field, can becurved. In contrast, in the spin Hall effect, although the magneticfield does not exist, only when an electron migrates (only when acurrent flows), the migration direction of the electron can be curved.In this regard, the typical Hall effect and the spin Hall effect aregreatly different from each other.

In a nonmagnetic substance (a material that is not a ferromagneticsubstance), the number of electrons of the first spin S1 and the numberof electrons of the second spin S2 are the same as each other.Accordingly, the number of electrons of the first spin S1 that facesupward in the drawing, and the number of electrons of the second spin S2that faces downward are the same as each other. According to this, acurrent as a net flux of charges is zero. A spin current that is notaccompanied with the current is particularly referred to as “pure spincurrent”.

In a case where a current is allowed to flow through a ferromagneticsubstance, the first spin S1 and the second spin S2 are curved indirections opposite to each other. In this regard, the nonmagneticsubstance and the ferromagnetic substance are the same as each other. Onthe other hand, in the ferromagnetic substance, either the first spin S1or the second spin S2 is rich, and as a result, a net flux of chargesoccurs (a voltage occurs). In this regard, the nonmagnetic substance andthe ferromagnetic substance are different from each other. Accordingly,as will be described later, as a material of the interfacial spingeneration layer 4, a material composed of a ferromagnetic substancealone is not included, and particularly, a nonmagnetic heavy metalmaterial can be exemplified.

Here, when a flow of electrons of the first spin S1 is set as J_(T), aflow of electrons of the second spin S2 is set as 0.4, and a spincurrent is set as J_(s), J_(s) is defined as In FIG. 2, J_(s) as thepure spin current flows upward in the drawing. Here, J_(s) represents aflow of electrons in which polarizability is 100%.

In FIGS. 1A and 1B, when the first ferromagnetic metal layer 1, which isa ferromagnetic substance, is brought into contact with an upper surfaceof the spin-orbit torque wiring 2, the pure spin current that isgenerated at the interface due to the interface Rashba effect and thepure spin current that is generated inside the first ferromagnetic metallayer 1 due to the spin Hall effect are diffused and transferred at theinside the spin-orbit torque wiring 2, and reach the first ferromagneticmetal layer 1. The pure spin currents are diffused and flow into thefirst ferromagnetic metal layer 1. That is, a spin is injected into thefirst ferromagnetic metal layer 1.

In the spin current magnetization rotational element 10 of thisembodiment, as described above, a current is allowed to flow to thespin-orbit torque wiring 2 to generate a pure spin current, and the purespin current is diffused to the first ferromagnetic metal layer 1 thatis in contact with the spin-orbit torque wiring 2. Accordingly,magnetization rotation of the first ferromagnetic metal layer 1 occursby a spin-orbit torque (SOT) effect due to the pure spin current. Whenthe SOT effect is sufficiently large, magnetization of the firstferromagnetic metal layer 1 is reversed. In this case, the spin currentmagnetization rotational element of this embodiment can be particularlyreferred to as “spin current magnetization reversal element”.

(Spin Conduction Layer)

The spin conduction layer 3 is constituted by a material that has lowelectric resistivity for lowering of electric resistance, and a longspin diffusion length (a distance in which the spin accumulationdisappears) for conduction of a spin current to the first ferromagneticmetal layer 1. For example, examples of a material that constitutes thespin conduction layer 3 include materials including at least one kind ofelement among Al, Si, Cu, Ag, GaAs, and Ge. The materials of the spinconduction layer 3 may be used as an elementary substance, or incombination thereof as an alloy, a compound, and the like.

It is preferable that the thickness of the spin conduction layer 3 isset to be equal to or lower than the spin diffusion length of the spinconduction layer 3. According to this, it is possible to transfer thespin current to the first ferromagnetic metal layer 1 without losingspin information. Particularly, the spin diffusion length depends on amaterial that is used. For example, it is known that a spin diffusionlength of Cu and Ag which are elementary substances reaches 100 nm orgreater at room temperature. Non Patent Literature 3 reported that thespin diffusion length of a Cu crystal that is an elementary substancereaches 500 μm at room temperature, and the spin diffusion length of anAg crystal that is an elementary substance reaches 700 μm at roomtemperature. Accordingly, it is possible to set the thickness of thespin conduction layer 3 to be equal to or less than the spin diffusionlength. In addition, as described in Non Patent Literature 3, the spindiffusion length of various kinds of materials are known to thoseskilled in the art already, or can be estimated by those skilled in theart. It should be understood that those skilled in the art can set thethickness of the spin conduction layer to be equal to or less than thespin diffusion length on the basis of the disclosure of thisspecification in a case of using various kinds of materials.

(Interfacial Spin Generation Layer)

The interfacial spin generation layer 4 is constituted by a materialthat generates large spin-orbit torque (SOT). As the material, anonmagnetic heavy metal, for example, materials including least one kindof element among Mo, Ru, Rh, Pd, Ta, W, Ir, Pt, Au, and Bi can beexemplified, and the materials of the interfacial spin generation layer4 may be used as an elementary substance or as in combination thereof asan alloy, a compound, and the like.

The material (heavy metal) that constitutes the interfacial spingeneration layer 4 has a spin diffusion length shorter than that of thematerial (wiring material) that constitutes the spin conduction layer 3.Accordingly, the thickness of the interfacial spin generation layer 4 isset to be small so that a spin current passes through the interfacialspin generation layer 4 and reaches the first ferromagnetic metal layer1 without losing spin information.

Particularly, the thickness of the interfacial spin generation layer 4is set to be two or less times an atomic radius of an atom thatconstitutes the interfacial spin generation layer 4. Here, as to betypically recognized by those skilled in the art, the atomic radiusrepresents the half of the minimum interatomic distance in a crystalthat is an elementary substance.

The thickness that is two or less times the atomic radius includes athickness of a monoatomic layer corresponding to a thickness that isaccurately two times the atomic radius, and a thickness that is smallerthan the thickness of the monoatomic layer. Here, the thickness smallerthan the thickness of the monoatomic layer represents that an open holeexists in the layer, that is, an open pore exists, and thus an averagethickness of the entirety of the layer is smaller than a thickness thatis two times the atomic radius. In the interfacial spin generation layer4 having the open hole, a spin current is likely to conduct through thehole and is likely to be generated. In other words, the interfacial spingeneration layer 4 may not constitute a perfect layer and may be a layerthat is included in the spin conduction layer 3, for example, a layerthat is doped inside the spin conduction layer 3. In a case of the verythin interfacial spin generation layer 4, the interfacial spingeneration layer 4 is formed from an elementary substance of theabove-described elements.

To allow the pure spin current to pass through the interfacial spingeneration layer 4, in addition to the structure in which the thicknessof the interfacial spin generation layer 4 is set to be as small aspossible, another structure can be considered. For example, as analternative structure of the interfacial spin generation layer 4, astructure in which thin wires (strips) are arranged, a mesh-shapedstructure, or a mechanically punched structure is considered. Even inthe structures, the pure spin current can effectively pass through theinterfacial spin generation layer 4. Particularly, in a case where theinterfacial spin generation layer 4 is mechanically punched, it ispossible to control a positional distribution of punched holes. As aresult, it is possible to control a flow of the spin current that passesthrough the interfacial spin generation layer 4. Accordingly, this caseis preferable.

In FIGS. 1A and 1B, three spin conduction layers 3 and three interfacialspin generation layers 4 are alternately laminated to form a six-layerstructure (the spin conduction layer 3, the interfacial spin generationlayer 4, the spin conduction layer 3, the interfacial spin generationlayer 4, the spin conduction layer 3, and the interfacial spingeneration layer 4 in this order from a lower side in the drawings), andthe interfacial spin generation layer 4 that is located at the uppermostlayer in the first direction (z direction) is joined to the firstferromagnetic metal layer 1. In the six-layer structure, or a structurein which the number of layers is set to six or greater, two or moreinterfacial spin generation layers 4 exist, and the number of interfacesis effectively increased. Accordingly, spin accumulation is enlarged andas a result, a spin current is enlarged. As a result, it is possible torealize the magnetization rotation (magnetization reversal) with a smallcurrent.

However, the invention is not limited to the above-described six-layerstructure. The number of a plurality of the spin conduction layers 3 andthe number of a plurality of the interfacial spin generation layers 4,which are alternately laminated, can be changed as long as theinterfacial spin generation layer 4 that is located at the uppermostlayer (the interfacial spin generation layer 4 that is located at theuppermost layer in the first direction (z direction)) is joined to thefirst ferromagnetic metal layer 1. For example, in another embodiment ofthe invention as illustrated in FIGS. 3A and 3B, two interfacial spingeneration layers 4 and one spin conduction layer 3 are alternatelylaminated to form a three-layer structure (the interfacial spingeneration layer 4, the spin conduction layer 3, and the interfacialspin generation layer 4 in this order from a lower side in thedrawings). In addition, in still another embodiment of the invention asillustrated in FIGS. 4A and 4B, two spin conduction layers 3 and twointerfacial spin generation layers 4 are alternately laminated to form afour-layer structure (the spin conduction layer 3, the interfacial spingeneration layer 4, the spin conduction layer 3, the interfacial spingeneration layer 4 in this order from a lower side in the drawings).Even in the structures, since two or more interfacial spin generationlayers 4 exist, it is possible to enlarge the spin current.

In addition, in the laminated structure of the spin conduction layer 3and the interfacial spin generation layer 4, a plurality of the spinconduction layers 3 may not have the same thickness, and a plurality ofthe interfacial spin generation layer 4 may not have the same thickness.In other words, the plurality of spin conduction layers 3 may havethicknesses different from each other, and the plurality of interfacialspin generation layers 4 may have thicknesses different from each other.For example, in a case where the plurality of interfacial spingeneration layers 4 exist, it is preferable that the thickness of aninterfacial spin generation layer 4 that exists at a position closest tothe first ferromagnetic metal layer 1 (that is, the interfacial spingeneration layer 4 that is located at the uppermost layer in the firstdirection (z direction) is set to be smaller than the thickness of theother interfacial spin generation layers 4. Here, in a case where all ofthe thicknesses of the plurality of interfacial spin generation layers 4are two or less times an atomic radius, the configuration in which thethickness of one of the interfacial spin generation layers 4 is set tobe smaller than the thickness of the other interfacial spin generationlayers 4 represents that the one interfacial spin generation layer 4 hasrelatively many defects (holes). According to this, a pure spin currentthat is generated at the interface between the other interfacial spingeneration layers 4 located in lower layers and the spin conductionlayers 3 is promoted to pass through the interfacial spin generationlayer 4 that is located at the uppermost portion, and to reach the firstferromagnetic metal layer 1.

In addition, the plurality of spin conduction layers 3 may not beconstituted by the same material, and the plurality of interfacial spingeneration layer 4 may not be constituted by the same material. In otherwords, the plurality of spin conduction layers 3 may be constituted bymaterials different from each other, and the plurality of interfacialspin generation layers 4 may be constituted by materials different fromeach other. For example, two spin conduction layers 3 with oneinterfacial spin generation layer 4 interposed therebetween may beconstituted by materials different from each other. In this case, amaterial is selected so that spin resistivity (flowing hardness of thespin current) of a spin conduction layer 3, which is close to the firstferromagnetic metal layer 1 (spin conduction layer that is located on anupward side in the first direction (z direction)), becomes smaller thanspin resistivity of a spin conduction layer 3 that is distant from thefirst ferromagnetic metal layer 1 (a spin conduction layer that islocated on a downward side in the first direction (z direction)). Forexample, since Cu has spin resistivity higher than that of Ag, the spinconduction layer 3 that is close to the first ferromagnetic metal layer1 is constituted by Ag, and the spin conduction layer 3 that is distantfrom the first ferromagnetic metal layer 1 is constituted by Cu.According to this, the pure spin current that is generated at aninterface between the spin conduction layer 3 that is located on adownward side and the interfacial spin generation layer 4 is reflectedby a material with high spin resistivity, and faces the firstferromagnetic metal layer 1 on an upward side.

In addition, the plurality of spin conduction layers 3 may have areas orcross-sectional areas different from each other, and the plurality ofinterfacial spin generation layers 4 may have areas or cross-sectionalareas different from each other. Particularly, when viewed from thefirst direction (z direction), a cross-sectional area of the interfacialspin generation layer 4 that is in contact with (or closest to) thefirst ferromagnetic metal layer 1 may be set to be smaller than across-sectional area of the other interfacial spin generation layers 4that is not in contact with (or is not closest to) the firstferromagnetic metal layer 1. Particularly, the interfacial spingeneration layer 4 that is in contact with the first ferromagnetic metallayer 1 may be set to exist only on a lower side (on a downward side inthe z direction) of the first ferromagnetic metal layer 1. With regardto a pure spin current that is generated on a side other than the lowerside of the first ferromagnetic metal layer 1, in a case where the firstferromagnetic metal layer 1 does not exist on an upper side of theinterfacial spin generation layer 4, a spin diffusion length of theinterfacial spin generation layer 4 is short, and thus spins arescattered, and spin information disappears. As a result, the pure spincurrent is invalid as energy. Accordingly, when the interfacial spingeneration layer 4 that is in contact with the first ferromagnetic metallayer 1 exists only on a lower side of the first ferromagnetic metallayer 1, the spin conduction layers 3 on a side other than the lowerside of the first ferromagnetic metal layer 1 are in contact with theinterlayer insulating film, and thus the pure spin current is reflectedand is injected into the first ferromagnetic metal layer 1. According tothis, it is possible to enhance energy efficiency.

Preferably, the thickness of each of the spin conduction layers 3 andthe thickness of each of the interfacial spin generation layers 4 areset so that the thickness of the spin-orbit torque wiring 2 that is astaked body of the layers becomes 20 nm or less. When the thicknessexceeds 20 nm and is too large, interfacial roughness between thespin-orbit torque wiring 2 and the first ferromagnetic metal layer 1that is laminated thereon becomes large, and thus there is a possibilitythat a magneto resistance effect may not be stable. A lower limit of thethickness of the spin-orbit torque wiring 2 is preferably 1nm, and thethickness of the spin-orbit torque wiring 2 is more preferably 2 nm to10 nm, but there is no limitation thereto.

The spin current magnetization rotational element 10 may further includean insulating layer that is in contact with a surface of the spin-orbittorque wiring 2 which is opposite to a surface that is in contact withthe first ferromagnetic metal layer 1. In this configuration, in a caseof being applied to a magneto resistance effect element or a usage otherthan the magneto resistance effect element, a current, which is allowedto flow the spin-orbit torque wiring 2, is prevented from being leakedto the surface opposite to the surface that is in contact with the firstferromagnetic metal layer 1, and thus it is possible to further enhancea current concentration effect.

In the above-described embodiment, description has been given of a casewhere the spin-orbit torque wiring is directly connected to the firstferromagnetic metal layer. However, as will be described later, anotherlayer such as a cap layer may be interposed between the firstferromagnetic metal layer and the spin-orbit torque wiring. That is, itis possible to employ a configuration in which the first ferromagneticmetal layer is located on one surface of the spin-orbit torque wiring,and in the spin-orbit torque wiring, one of the interfacial spingeneration layers is closest to the first ferromagnetic metal layer.More details of the cap layer will be described in association with acap layer 104 in the following application of the magneto resistanceeffect element.

As will be described later, the spin current magnetization rotationalelement of this embodiment is applicable to a magneto resistance effectelement. The use is not limited to the magneto resistance effectelement, and application to another use is also possible. With regard tothe other use, for example, the spin current magnetization rotationalelement may be used in a spatial optical modulator in which the spincurrent magnetization rotational element is disposed in respectivepixels to spatially modulate incident light by using a magneto-opticaleffect. In addition, a magnetic field, which is applied to an axis ofeasy magnetization of a magnet to avoid a hysteresis effect due tocoercivity of a magnet in a magnetic sensor, may be substituted withSOT.

(Magneto resistance Effect Element)

A magneto resistance effect element according the embodiment of theinvention includes the spin current magnetization rotational element ofthe embodiment of the invention, a second ferromagnetic metal layer inwhich a magnetization direction is fixed, and a nonmagnetic layer thatis interposed between the first ferromagnetic metal layer and the secondferromagnetic metal layer.

FIG. 5 is an application example of the spin current magnetizationrotational element of the invention, and is a perspective viewschematically illustrating a magneto resistance effect element accordingto an embodiment of the invention. Furthermore, in FIG. 5,characteristic portions of the spin current magnetization rotationalelement of the invention are not illustrated.

A magneto resistance effect element 100 illustrated in FIG. 5 includesthe spin current magnetization rotational element (a first ferromagneticmetal layer 101 and a spin-orbit torque wiring 120) according to theembodiment of the invention, a second ferromagnetic metal layer 103 inwhich a magnetization direction is fixed, and a nonmagnetic layer 102that is interposed between the first ferromagnetic metal layer 101 andthe second ferromagnetic metal layer 103. The first ferromagnetic metallayer 101 has the same configuration as in the first ferromagnetic metallayer 1, and the spin-orbit torque wiring 120 has the same configurationas in the spin-orbit torque wiring 2. In addition, it can be said thatthe magneto resistance effect element 100 illustrated in FIG. 5 includesa magneto resistance effect element part 105 (the first ferromagneticmetal layer 101, the nonmagnetic layer 102, and the second ferromagneticmetal layer 103) and the spin-orbit torque wiring 120.

The magneto resistance effect element according to the embodiment of theinvention includes the spin-orbit torque wiring 120, and may have aconfiguration in which magnetization reversal of the magneto resistanceeffect element is performed with SOT alone due to the pure spin current(hereinafter, may be referred to as “SOT-alone” configuration), or aconfiguration in which in the magneto resistance effect element usingSTT of the related art, SOT due to the pure spin current is used incombination.

In the following description including FIG. 5, as an example of aconfiguration in which the spin-orbit torque wiring 120 extends in adirection intersecting a lamination direction of the magneto resistanceeffect element part 105, description will be given of a case of aconfiguration extending in an orthogonal direction.

In FIG. 5, a wiring 130 through which a current flows in the laminationdirection of the magneto resistance effect element 100, and a substrate110 that forms the wiring 130 are also illustrated. In addition, themagneto resistance effect element 100 includes a cap layer 104 that isprovided between the first ferromagnetic metal layer 101 and thespin-orbit torque wiring 120.

<Magneto resistance Effect Element Part>

The magneto resistance effect element part 105 includes the secondferromagnetic metal layer 103 in which a magnetization direction isfixed, the first ferromagnetic metal layer 101 for a magnetizationdirection to be changed, and the nonmagnetic layer 102 that isinterposed between the second ferromagnetic metal layer 103 and thefirst ferromagnetic metal layer 101.

Since magnetization of the second ferromagnetic metal layer 103 is fixedin one direction, and the magnetization direction of the firstferromagnetic metal layer 101 relatively varies, the magneto resistanceeffect element part 105 functions as a magneto resistance effectelement. In an application to coercivity difference type (pseudo spinvalve type) MRAM, coercivity of the second ferromagnetic metal layer isgreater than coercivity of the first ferromagnetic metal layer, and inan application to an exchange bias type (spin valve type) MRAM, in thesecond ferromagnetic metal layer, the magnetization direction is fixeddue to exchange coupling with an antiferromagnetic layer.

In addition, in a case where the nonmagnetic layer 102 is formed from aninsulator, the magneto resistance effect element part 105 is a tunnelingmagnetoresistive element (TMR) element, and in a case where thenonmagnetic layer 102 is formed from a metal, the magneto resistanceeffect element part 105 is a giant magnetoresistive (GMR) element.

With regard to the magneto resistance effect element part 105 of thisembodiment, a configuration of a known magneto resistance effect elementpart can be used. For example, each layer may include a plurality oflayers, or another layer such as an antiferromagnetic layer configuredto fix the magnetization direction of the second ferromagnetic metallayer may be provided.

The second ferromagnetic metal layer 103 is called a fixed layer, a pinlayer, a reference layer, and the like, and the first ferromagneticmetal layer 101 is called a free layer, a storage layer, and the like.

The second ferromagnetic metal layer 103 and the first ferromagneticmetal layer 101 may be an in-plane magnetization film in which themagnetization direction is an in-plane direction parallel to a layer, oran orthogonal magnetization film in which the magnetization direction isa direction orthogonal to a layer.

As a material of the second ferromagnetic metal layer 103, a knownmaterial can be used. For example, a metal that is selected from thegroup consisting of Cr, Mn, Co, Fe, and Ni, and alloys which include oneor more kinds of the metals and exhibit ferromagnetism can be used. Inaddition, alloys which include the metals, and at least one or morekinds of elements among B, C, and N, can be used. Specific examplesthereof include Co—Fe, and Co—Fe—B.

In addition, it is preferable to use a Heusler alloy such as Co₂FeSi toobtain a relatively higher output. The Heusler alloy includes anintermetallic compound having a chemical composition of X₂YZ. Here, Xrepresents a transition metal element or a noble metal element of agroup of Co, Fe, Ni, or Cu in a periodic table, Y represents atransition metal of a group of Mn, V, Cr, or Ti and can also employelement species of X, and Z is a typical element of a group III to agroup V. Examples of the Heusler alloy include Co₂FeSi, Co₂MnSi,Co₂Mn_(1-a)Fe_(a)Al_(b)Si_(1-b), and the like.

In addition, to further increase coercivity of the second ferromagneticmetal layer 103 with respect to the first ferromagnetic metal layer 101,as a layer (pinning layer) that is in contact with the secondferromagnetic metal layer 103 on a surface opposite to a surface that isin contact with the nonmagnetic layer 102, a layer of anantiferromagnetic material such as IrMn and PtMn may be provided.Specifically, the layer may be provided between the second ferromagneticmetal layer 103 and the wiring 130. In addition, it is possible toemploy a synthetic ferromagnetic coupling structure so that a leakagemagnetic field of the second ferromagnetic metal layer 103 does not havean effect on the first ferromagnetic metal layer 101.

In addition, in a case where the magnetization direction of the secondferromagnetic metal layer 103 is set to orthogonal to a laminationsurface, it is preferable to use a laminated film of Co and Pt.Specifically, the second ferromagnetic metal layer 103 may be set to [Co(0.24 nm)/Pt (0.16 nm)]6/Ru (0.9 nm)/[Pt (0.16 nm)/Co (0.16 nm)]4/Ta(0.2 nm)/FeB (1.0 nm).

As a material of the first ferromagnetic metal layer 101, aferromagnetic material, particularly, a soft-magnetic material can beapplied. For example, a metal selected from the group consisting of Cr,Mn, Co, Fe, and Ni, an alloy that includes one or more kinds of themetals, an alloy that includes the metals and at least one or moreelements among B, C, and N, and the like can be used. Specific examplesthereof include Co—Fe, Co—Fe—B, and Ni—Fe.

In a case where a magnetization direction of the first ferromagneticmetal layer 101 is set to be orthogonal to a lamination surface, it ispreferable that the film thickness of the first ferromagnetic metallayer is set to 2.5 nm or less. According to this, at an interfacebetween the first ferromagnetic metal layer 101 and the nonmagneticlayer 102, it is possible to apply orthogonal magnetic anisotropy to thefirst ferromagnetic metal layer 101. In addition, when the filmthickness of the first ferromagnetic metal layer 101 is set to be large,an effect of the interface orthogonal magnetic anisotropy is attenuated,and thus it is preferable that the film thickness of the firstferromagnetic metal layer 101 is set to be small. In addition, it ispreferable that the thickness of the first ferromagnetic metal layer is0.5 nm or greater, and more preferably 0.5 nm to 2.0 nm, but there is nolimitation to the ranges.

A known material can be used for the nonmagnetic layer 102. For example,in a case where the nonmagnetic layer 102 is constituted by an insulator(that is, in a case of a tunnel barrier layer), as a material thereof,Al₂O₃, SiO₂, Mg, and MgAl₂O₄ and the like can be used. In addition, inaddition to these materials, materials in which a part of Al, Si, and Mgis substituted with Zn, Be, and the like, and the like can be used.Among these, MgO or MgAl₂O₄ is a material capable of realizing acoherent tunnel, and thus it is possible to efficiently inject a spin.In addition, in a case where the nonmagnetic layer 102 is constituted bya metal, as a material thereof, Cu, Au, Ag, and the like can be used.

In addition, it is preferable that the cap layer 104 is formed on asurface opposite to the nonmagnetic layer 102 of the first ferromagneticmetal layer 101 as illustrated in FIG. 5. The cap layer 104 can suppressdiffusion of elements from the first ferromagnetic metal layer 101. Inaddition, the cap layer 104 also contributes to a crystal orientation ofeach layer of the magneto resistance effect element part 105. As aresult, when the cap layer 104 is provided, magnetism of the secondferromagnetic metal layer 103 and the first ferromagnetic metal layer101 of the magneto resistance effect element part 105 is stabilized, andthus it is possible to realize a reduction in resistance of the magnetoresistance effect element part 105.

In the cap layer 104, a high-conductivity material is preferably used.For example, Ru, Ta, Cu, Ag, Au, and the like can be used. It ispreferable that a crystal structure of the cap layer 104 isappropriately set to a face centered cubic (fcc) structure, a hexagonalclosest packing (hcp) structure, or a body centered cubic (bcc)structure in accordance with a crystal structure of the ferromagneticmetal layer that is adjacent to the cap layer 104.

In addition, it is preferable to use any one selected from the groupconsisting of Ag, Cu, Mg, and Al in the cap layer 104. Although detailswill be described later, in a case where the spin-orbit torque wiring120 and the magneto resistance effect element part 105 are connectedthrough the cap layer 104, it is preferable that the cap layer 104 doesnot scatter a spin that propagates from the spin-orbit torque wiring120. It is known that silver, copper, magnesium, aluminum, and the likehas a spin diffusion length is as long as 100 nm or greater, and thusthe spin is less likely to be scattered.

It is preferable that the thickness of the cap layer 104 is equal to orless than a spin diffusion length of a material that constitutes the caplayer 104. When the thickness of the cap layer 104 is equal to or lessthan the spin diffusion length, it is possible to sufficiently transferthe spin that propagates from the spin-orbit torque wiring 120 to themagneto resistance effect element part 105. In addition, when the spinof the spin-orbit torque wiring can be injected into the firstferromagnetic metal layer, a layer other than the cap layer 104 may beinterposed between the first ferromagnetic metal layer and thespin-orbit torque wiring. Examples of the layer include Ag, Cu, Mg, andAl which have a thickness of approximately 0.5 to 2.0 nm.

<Substrate>

It is preferable that the substrate 110 is excellent in flatness. Toobtain a surface with excellent flatness, it is possible to use amaterial, for example, Si, AlTiC, and the like.

An underlayer (not illustrated) may be formed on a surface of thesubstrate 110 on the magneto resistance effect element part 105 side.When the underlayer is provided, it is possible to control crystallinitysuch as a crystal orientation and a crystal grain size of respectivelayers including the second ferromagnetic metal layer 103 that islaminated on the substrate 110.

It is preferable that the underlayer has an insulating property in orderfor a current flowing to a wiring 130 and the like not to be scattered.As the underlayer, various layers can be used. For example, as oneexample, a nitride layer, which has a (001)-oriented NaCl structure andincludes at least one element selected from the group consisting of Ti,Zr, Nb, V, Hf, Ta, Mo, W, B, Al, and Ce, can be used in the underlayer.

As another example, it is possible to use a (002)-orientedperovskite-based conductive oxide layer expressed by a compositionformula of XYO₃ can be used in the underlayer. Here, a site X includesat least one element selected from the group consisting of Sr, Ce, Dy,La, K, Ca, Na, Pb, and Ba, and a site Y includes at least one elementthat is selected from the group consisting of Ti, V, Cr, Mn, Fe, Co, Ni,Ga, Nb, Mo, Ru, Ir, Ta, Ce, and Pb.

As still another example, it is possible to use an oxide layer that hasa (001)-oriented NaCl structure and includes at least one elementselected from the group consisting of Mg, Al, and Ce in the underlayer.

As still another example, it is possible to use a layer that has a(001)-oriented tetragonal structure or cubic structure, and includes atleast one element selected from the group consisting of Al, Cr, Fe, Co,Rh, Pd, Ag, Ir, Pt, Au, Mo, and W as the underlayer.

In addition, the underlayer is not limited to a monolayer, and aplurality of the layers in the examples may be laminated. Throughexamination of a configuration of the underlayer, it is possible toenhance crystallinity of each layer of the magneto resistance effectelement part 105, and thus it is possible to improve magneticcharacteristics.

<Wiring>

The wiring 130 is electrically connected to the second ferromagneticmetal layer 103 of the magneto resistance effect element part 105, andin FIG. 5, the wiring 130, the spin-orbit torque wiring 120, and a powersupply (not illustrated) constitute a closed circuit, and thus a currentflows in a lamination direction of the magneto resistance effect elementpart 105.

A material of the wiring 130 is not particularly limited as long as thematerial has high conductivity. For example, aluminum, silver, copper,gold, and the like can be used.

In the embodiment, description has been given of an example of aso-called bottom pin structure in which in the magneto resistance effectelement 100, the first ferromagnetic metal layer 101 that is laminatedlater and is disposed on a side far away from the substrate 110 becomesa magnetization-free layer, and the second ferromagnetic metal layer 103that is laminated first and is disposed on a side close to the substrate110 becomes a magnetization fixed layer (pin layer), but the structureof the magneto resistance effect element 100 is not particularlylimited, and a so-called top pin structure is also possible.

<Power Supply>

The magneto resistance effect element 100 further includes a first powersupply 140 that allows a current to flow in the lamination direction ofthe magneto resistance effect element part 105, and a second powersupply 150 that allows a current to flow to the spin-orbit torque wiring120.

The first power supply 140 is connected to the wiring 130 and thespin-orbit torque wiring 120. The first power supply 140 can control acurrent that flows in the lamination direction of the magneto resistanceeffect element 100.

The second power supply 150 is connected to both ends of the spin-orbittorque wiring 120. The second power supply 150 can control a currentthat is a current that flows in a direction orthogonal to the laminationdirection of the magneto resistance effect element part 105, that is, acurrent that flows to the spin-orbit torque wiring 120.

As described above, the current that flows in the lamination directionof the magneto resistance effect element part 105 causes STT. Incontrast, the current that flows to the spin-orbit torque wiring 120causes SOT. Both the STT and the SOT contribute to magnetizationreversal of the first ferromagnetic metal layer 101.

As described above, the amount of currents, which respectively flow inthe lamination direction of the magneto resistance effect element part105 and in a direction that orthogonal to the lamination direction, iscontrolled by the two power supplies, and thus it is possible to freelycontrol contribution rates of the SOT and the STT with respect to themagnetization reversal.

For example, in a case where it is difficult to flow a large current toa device, control may be performed so that the STT with high energyefficiency with respect to the magnetization reversal becomes a maintype. That is, the amount of current that flows from the first powersupply 140 may be increased, and the amount of current that flows fromthe second power supply 150 may be decreased.

In addition, for example, in a case where it is necessary to prepare athin device, and thus it is necessary to make the thickness of thenonmagnetic layer 102 be small, it is required to reduce a current thatflows to the nonmagnetic layer 102. In this case, the amount of currentthat flows from the first power supply 140 may be reduced, and theamount of current that flows from the second power supply 150 may beincreased to enhance the contribution rate of the SOT.

A known power supply can be used as the first power supply 140 and thesecond power supply 150.

As described above, according to the magneto resistance effect elementof the invention in a case of the configuration using the STT type andthe SOT type in combination, the contribution rate of the STT and theSOT can be freely controlled by the amount of currents which aresupplied from the first power supply and the second power supply.According to this, it is possible to freely control the contributionrate of the STT and the SOT in correspondence with a performance that isrequired for a device, and thus the magneto resistance effect elementcan function as a magneto resistance effect element with relatively highgeneral-purpose properties.

(Manufacturing Method)

A method of manufacturing the spin current magnetization rotationalelement and the magneto resistance effect element including the spincurrent magnetization rotation element according to the embodiment ofthe invention is not particularly limited, and a known film formationmethod can be used. With regard to the film formation method, forexample, as a physical vapor deposition (PVD) method, resistive heatingdeposition, electron beam deposition, a molecular beam epitaxy (MBE)method, an ion plating method, an ion beam deposition method, asputtering method, and the like can be used. Alternatively, as achemical vapor deposition (CVD) method, a thermal CVD method, an opticalCVD method, a plasma CVD method, a metalorganic chemical vapordeposition (MOCVD) method, an atomic layer deposition (ALD) method, andthe like can be used. In addition, a single atom layer doping method(delta doping method) can be used to form a very thin interface spingeneration layer having a thickness that is two or less times an atomicradius. In the following description, description will be given of anexample of a method of manufacturing the magneto resistance effectelement to which a spin-orbit torque type magnetization reversal elementis applied, and the description is also true of a method ofmanufacturing a spin-orbit torque type magnetization reversal element.

First, the spin-orbit torque wiring is prepared on a substrate thatbecomes a support. For example, the spin conductive layer is formed byusing an MBE method. For example, the interfacial spin generation layeris formed on the spin conduction layer by using a sputtering method inwhich adjustment is made to a low film formation rate. Then, a processof forming the spin conduction layer is repeated to obtain a laminationbody in which the spin conduction layer and the interfacial spingeneration layer are alternately laminated. Then, the spin-orbit torquewiring is processed into a predetermined shape by using a technologysuch as photolithography.

Then, a portion other than the spin-orbit torque wiring is covered withan insulating film such as an oxide film. An exposed surface of thespin-orbit torque wiring and the insulating film is preferably polishedby a chemical-mechanical polishing (CMP).

Then, the magneto resistance effect element is prepared. For example,the magneto resistance effect element is prepared by using a sputteringmethod. In a case where the magneto resistance effect element is the TMRelement, for example, a tunnel barrier layer is formed as follows.First, a metal thin film including magnesium, aluminum, and divalentcations of a plurality of nonmagnetic elements is sputtered onto thefirst ferromagnetic metal layer in a thickness of approximately 0.4 to2.0 nm, and plasma oxidation or natural oxidation due to introduction ofoxygen is performed. Then, a heat treatment is performed.

It is preferable that the resultant laminated film that is obtained issubjected to an annealing treatment. A layer that is formed throughreactive sputtering is amorphous, and thus it is necessary tocrystallize the layer. For example, in a case of using Co—Fe—B as theferromagnetic metal layer, a part of B is leaked due to the annealingtreatment, and thus the layer is crystallized

In the magneto resistance effect element that is prepared through theannealing treatment, a magneto resistance ratio is further improved incomparison to a magneto resistance effect element that is preparedwithout being subjected to the annealing treatment. The reason for thisis considered to be because uniformity in a crystal size and orientationof the tunnel barrier layer of the nonmagnetic layer are improved due tothe annealing treatment.

With regard to the annealing treatment, it is preferable that heating isperformed at a temperature of 300° C. to 500° C. for 5 minutes to 100minutes in an inert atmosphere such as Ar, and heating is performed at atemperature of 100° C. to 500° C. for 1 hour to 10 hours in a state inwhich a magnetic field of 2 kOe to 10 kOe is applied.

As a method of shaping the magneto resistance effect element into apredetermined shape, processing means such as photolithography can beused. First, the magneto resistance effect element is laminated, and asurface, which is opposite to the spin-orbit torque wiring, of themagneto resistance effect element is coated with a resist. Then, theresist in a predetermined portion is cured to remove the resist in anunnecessary portion. A portion in which the resist is cured becomes aprotective film of the magneto resistance effect element. The portion inwhich the resist is cured matches a shape of the magneto resistanceeffect element that is finally obtained.

In addition, the surface on which the protective film is formed issubjected to a treatment such as ion milling and reactive ion etching(ME). A portion in which the protective film is not formed is removed,and thus a magneto resistance effect element having a predeterminedshape is obtained.

The invention is not limited to the configuration of the spin-orbittorque type magnetization reversal element according to the embodiment,and the manufacturing method thereof, and various modifications can bemade in a range not departing from the gist of the invention.

(Magnetic Memory)

A magnetic memory (MRAM) according to an embodiment of the inventionincludes a plurality of the magneto resistance effect elements accordingto the embodiment of the invention.

(Magnetization Reversal Method)

In the magneto resistance effect element according to the embodiment ofthe invention, in a case of performing magnetization reversal, it ispreferable that a current density that is allowed to flow to thespin-orbit torque wiring is set to be less than 1×10⁷ A/cm². When thecurrent density of the current that is allowed to flow to the spin-orbittorque wiring is excessively large, heat is generated due to the currentthat flows to the spin-orbit torque wiring. When heat is applied to thesecond ferromagnetic metal layer, magnetization stabilization of thesecond ferromagnetic metal layer disappears, and magnetization reversalthat is not assumed, and the like may occur. When the magnetizationreversal that is not assumed occurs, a problem that recorded informationis updated occurs. That is, it is preferable that the current density ofthe current that is allowed to flow to the spin-orbit torque wiring isnot excessively large so as to avoid the magnetization reversal that isnot assumed. When the current density of the current that is allowed toflow to the spin-orbit torque wiring is less than 1×10⁷ A/cm², it ispossible to avoid at least occurrence of the magnetization reversal dueto heat that is generated.

With regard to the magnetization reversal method, in the magnetoresistance effect element according to the embodiment of the invention,in a case of a configuration in which the STT type and the SOT type areused in combination, a current may be applied by a power supply of themagneto resistance effect element after applying a current by a powersupply of the spin-orbit torque wiring.

An SOT magnetization reversal process and an STT magnetization reversalprocess may be simultaneously performed, or the STT magnetizationreversal process may be additionally performed after performing the SOTmagnetization reversal process in advance. A current may be suppliedsimultaneously from the first power supply 140 and the second powersupply 150, or a current may be additionally supplied from the firstpower supply 140 after supplying a current from the second power supply150. However, it is preferable that a current is applied by the powersupply of the magnetization effect element after applying a current bythe power supply of the spin-orbit torque wiring to obtain an assisteffect of the magnetization reversal by using the SOT in a more reliablemanner. That is, it is preferable that a current is additionallysupplied from the first power supply 140 after supplying a current fromthe second power supply 150.

INDUSTRIAL APPLICABILITY

According to the spin current magnetization rotational element of theinvention, it is possible to reduce a current density that is necessaryfor magnetization rotation, and it is also possible to reduce powerconsumption.

REFERENCE SIGNS LIST

1 First ferromagnetic metal layer

2 Spin-orbit torque wiring

3 Spin conduction layer

4 Interfacial spin generation layer

10 Spin current magnetization rotational element (spin currentmagnetization reversal element)

100 Magneto resistance effect element

101 First ferromagnetic metal layer

102 Nonmagnetic layer

103 Second ferromagnetic metal layer

104 Cap layer

105 Magneto resistance effect element portion

110 Substrate

120 Spin-orbit torque wiring

130 Wiring

140 First power supply

150 Second power supply

1. A spin current magnetization rotational element, comprising: a firstferromagnetic metal layer for a magnetization direction to be changed; aspin-orbit torque wiring which extends in a second directionintersecting a first direction that is a plane-orthogonal direction ofthe first ferromagnetic metal layer, the first ferromagnetic metal layerbeing located on one surface of the spin-orbit torque wiring; and anunderlayer provided on other surface of the spin-orbit torque wiring,the other surface being a surface of the spin-orbit torque wiringopposite to the one surface with the first ferromagnetic metal laye r,wherein the spin-orbit torque wiring has a structure in which a spinconduction layer and an interfacial spin generation layer arealternately laminated in the first direction, and the underlayerincludes an oxide or a metal.
 2. The spin current magnetizationrotational element according to claim 1, wherein the oxide includes anelement selected from a group consisting of Mg, Al, Ce, Cr, Fe, Co, Rh,Pd, Ag, Ir, Pt, Au, Mo and W.
 3. The spin current magnetizationrotational element according to claim 1, wherein the thickness of eachof the plurality of interfacial spin generation layers is two or lesstimes an atomic radius of an atom that constitutes the interfacial spingeneration layer.
 4. The spin current magnetization rotational elementaccording to claim 1, wherein the spin conduction layer is constitutedby a material that includes at least any one kind of element among Al,Si, Cu, Ag, GaAs, and Ge.
 5. The spin current magnetization rotationalelement according to claim 1, wherein the plurality of interfacial spingeneration layers are constituted by a material that includes anyelement among Mo, Ru, Rh, Pd, Ta, W, Ir, Pt, Au, or Bi.
 6. The spincurrent magnetization rotational element according to claim 1, whereinthe thickness of the spin conduction layer is equal to or less than aspin diffusion length of the spin conduction layer.
 7. The spin currentmagnetization rotational element according to claim 1, wherein among theplurality of interfacial spin generation layers, the thickness of theinterfacial spin generation layer closest to the first ferromagneticmetal layer is smaller than the thickness of the other interfacial spingeneration layers.
 8. The spin current magnetization rotational elementaccording to claim 1, wherein a plurality of the spin conduction layersare constituted by materials different from each other in a state inwhich each of the interfacial spin generation layers is interposedbetween the plurality of spin conduction layers, and a spin resistivityof a spin conduction layer close to the first ferromagnetic metal layeris smaller than a spin resistivity of a spin conduction layer distantfrom the first ferromagnetic metal layer.
 9. The spin currentmagnetization rotational element according to claim 1, wherein whenviewed from the first direction, a cross-sectional area of theinterfacial spin generation layer closest to the first ferromagneticmetal layer is smaller than a cross-sectional area of the otherinterfacial spin generation layers which are not closest to the firstferromagnetic metal layer.
 10. The spin current magnetization rotationalelement according to claim 1, wherein the thickness of the spin-orbittorque wiring is 20 nm or less.
 11. A magneto resistance effect element,comprising: the spin current magnetization rotational element accordingto claim 1; a second ferromagnetic metal layer in which a magnetizationdirection is fixed; and a nonmagnetic layer that is interposed betweenthe first ferromagnetic metal layer and the second ferromagnetic metallayer.
 12. A magnetic memory, comprising: a plurality of the magnetoresistance effect elements according to claim
 11. 13. The spin currentmagnetization rotational element according to claim 4, wherein theplurality of interfacial spin generation layers are constituted by amaterial that includes any element among Mo, Ru, Rh, Pd, Ta, W, Ir, Pt,Au, or Bi.
 14. The spin current magnetization rotational elementaccording to claim 4, wherein the thickness of the spin conduction layeris equal to or less than a spin diffusion length of the spin conductionlayer.
 15. The spin current magnetization rotational element accordingto claim 4, wherein among the plurality of interfacial spin generationlayers, the thickness of the interfacial spin generation layer closestto the first ferromagnetic metal layer is smaller than the thickness ofthe other interfacial spin generation layers.
 16. The spin currentmagnetization rotational element according to claim 4, wherein aplurality of the spin conduction layers are constituted by materialsdifferent from each other in a state in which each of the interfacialspin generation layers is interposed between the plurality of spinconduction layers, and a spin resistivity of a spin conduction layerclose to the first ferromagnetic metal layer is smaller than a spinresistivity of a spin conduction layer distant from the firstferromagnetic metal layer.
 17. The spin current magnetization rotationalelement according to claim 4, wherein when viewed from the firstdirection, a cross-sectional area of the interfacial spin generationlayer closest to the first ferromagnetic metal layer is smaller than across-sectional area of the other interfacial spin generation layerswhich are not closest to the first ferromagnetic metal layer.
 18. Thespin current magnetization rotational element according to claim 5,wherein among the plurality of interfacial spin generation layers, thethickness of the interfacial spin generation layer closest to the firstferromagnetic metal layer is smaller than the thickness of the otherinterfacial spin generation layers.
 19. The spin current magnetizationrotational element according to claim 5, wherein when viewed from thefirst direction, a cross-sectional area of the interfacial spingeneration layer closest to the first ferromagnetic metal layer issmaller than a cross-sectional area of the other interfacial spingeneration layers which are not closest to the first ferromagnetic metallayer.
 20. The spin current magnetization rotational element accordingto claim 7, wherein when viewed from the first direction, across-sectional area of the interfacial spin generation layer closest tothe first ferromagnetic metal layer is smaller than a cross-sectionalarea of the other interfacial spin generation layers which are notclosest to the first ferromagnetic metal layer.